Industrial equipment article

ABSTRACT

Industrial equipment articles and thermal chemical vapor coated articles are disclosed. The articles include a coating on a substrate of the industrial equipment article, the coating including silicon, carbon, and hydrogen. The industrial equipment article requires resistance to protein adsorption. The industrial equipment article was heated during application of the coating to a temperature of between 300 degrees C. and 600 degrees C. The thermal chemical vapor coated article includes a coating on the thermal chemical vapor coated article, the coating formed by thermal decomposition, oxidation, then functionalization. The thermal chemical vapor coated article is industrial equipment requiring resistance to protein adsorption. The coating is resistant to the protein adsorption and is on a substrate heated during the thermal decomposition.

PRIORITY

This application is a non-provisional continuation patent applicationclaiming priority and benefit of U.S. Provisional Patent Application No.61/976,789, entitled “COATED ARTICLE,” along with U.S. Non-Provisionalpatent application Ser. No. 14/680,669, entitled “THERMAL CHEMICAL VAPORDEPOSITION COATED ARTICLE AND PROCESS” and now pending issuance, both ofwhich are hereby incorporated by reference in their entirety.

FIELD

The present disclosure is directed to coated articles and coatingprocesses. More particularly, the disclosure is directed to industrialequipment articles coated with thermal chemical vapor depositioncoatings.

BACKGROUND

Often, surfaces of substrates do not include desired performancecharacteristics. The failure to include specific desired performancecharacteristics can result in surface degradation in certainenvironments, an inability to meet certain performance requirements, orcombinations thereof. Biofouling and/or biocontamination presents asevere challenge in a wide range of applications from biomedical devicesand protective apparel in hospitals, medical implants, biosensors, foodpackaging and storage, water purification systems, to marine andindustrial equipment. For example, in marine applications, biofoulants,such as, algae, barnacles, tunicates, and mussels frequently invade shiphulls, piers, offshore oil and gas platforms. Such biofoulants causeincreased drag and damage of materials, which results in billion dollarsof cost due to decreased fuel efficiency.

Another problem, known as protein adsorption exists in the human body,affecting contact lenses, endotracheal tubes, artificial joints,biomedical implants, and other similar devices. Protein adsorptioninvolves protein sticking to surfaces of biomedical devices. This causesmillions of contact lens infections every year and requires heartpatients to take anti-clotting drugs. Adsorption of proteins tobiological sampling systems also reduces sensitivity in the case of invitro diagnostics.

In general, an inert surface resistant to biofouling is needed. However,existing solutions to biofouling have significant drawbacks. Forexample, the most commonly used substances to impart protein resistanceto a surface are based on oligo(ethylene glycol) or poly(ethyleneglycol) (PEG). However, such substances are not stable and have atendency to auto-oxidize in the presence of oxygen, thereby losingprotein-resistance.

In marine applications, current anti-fouling strategies utilize paintsor coatings having heavy metals that gradually dissolve and releasetoxic substances like copper, tin, zinc or organic biocides. Such toxicsubstances poison everything and anything that attaches to a ship hull.The environmental concerns have prompted the international maritimecommunity to ban tin-based marine coatings on newly built vessels, andUnited States Navy standards require that replacement coatings beenvironmentally benign and stable for ten to twelve years.

Accordingly, a coated article that does not suffer from one or more ofthe above drawbacks would be desired in the art.

SUMMARY

According to an embodiment of the present disclosure, an industrialequipment article includes a coating on a substrate of the industrialequipment article, the coating including silicon, carbon, and hydrogen.The industrial equipment article requires resistance to proteinadsorption. The substrate of the industrial equipment article was heatedduring application of the coating to a temperature of between 300degrees C. and 600 degrees C.

According to an embodiment of the present disclosure, a thermal chemicalvapor coated article includes a coating on the thermal chemical vaporcoated article, the coating formed by thermal decomposition, oxidationthen functionalization. The thermal chemical vapor coated article isindustrial equipment requiring resistance to protein adsorption. Thecoating is resistant to the protein adsorption and is on a substrateheated during the thermal decomposition.

Further aspects of embodiments of the invention are disclosed herein.The features as discussed above, as well as other features andadvantages of the present application, will be appreciated andunderstood by those skilled in the art from the following drawings anddetailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a schematic view of an article having a coating with alayer formed from decomposition of a material according to an embodimentof the disclosure.

FIG. 2 shows a schematic view of a process according to an embodiment ofthe disclosure.

FIG. 3 shows a schematic view of an article having a coating with anoxidized layer formed according to an embodiment of the disclosure.

FIG. 4 shows a schematic view of an article having a coating with anoxidized-then-functionalized layer formed according to an embodiment ofthe disclosure.

FIG. 5 shows a schematic view of an article having a coating with anoxidized-then-functionalized layer formed according to an embodiment ofthe disclosure.

FIG. 6 shows an Auger Electron Spectroscopy plot of an article having alayer formed from decomposition of material according to an embodimentof the disclosure.

FIG. 7 shows an Auger Electron Spectroscopy plot of an article having alayer formed from decomposition of material followed by oxidation withwater according to an embodiment of the disclosure.

Wherever possible, the same reference numbers will be used throughoutthe drawings to represent the same parts.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

U.S. patent application Ser. No. 13/504,533, filed Apr. 27, 2012, andtitled “Coating, Coated Article, and Method of Applying a Coating,” ishereby incorporated by reference in its entirety. Provided is a coating,a coated article, and a chemical vapor deposition process for producinga coated article. Embodiments of the present disclosure permit coatings,for example, in comparison to similar coatings failing to include one ormore of the features disclosed herein, to include additional propertiesrelating to having protein resistance and general anti-biofoulingproperties, having consistent or substantially consistent thicknesswithin tube or tube-like articles, being devoid or substantially devoidof build up in entrances of the tube or tube-like articles, or acombination thereof.

In one embodiment, a coating 101 (see FIG. 1) is resistant to foulingconditions. As used herein, “fouling conditions” refer to conditionsthat are present in the presence of micro-organisms, such as, alga,barnacles, tunicates, and mussels that frequently invade ship hulls,piers, offshore oil and gas platforms. In further embodiments, thecoating is more resistant to such conditions than uncoated alloys,teflon, stainless steel, or a combination thereof.

In one embodiment, the coating 101 is resistant to protein adsorptionconditions. As used herein, “protein adsorption conditions” refer toconditions with protein at a concentration that is capable of adsorptionto a stainless steel surface.

A coating process 200 (see FIG. 2) forms the coating 101 on a substrate100 of an article 103, for example, as is shown in FIG. 1. The article103 is any suitable object that benefits from anti-fouling propertiesbut is capable of withstanding processing temperatures of the coatingprocess 200. Suitable objects include, but are not limited to,biomedical devices, surgical equipment, medical diagnostic samplingsystems, medical implants, parts of marine and/or industrial equipment,coastal marine structures, offshore structures, ocean/island vessels,similar objects, or combinations thereof.

For example, in one embodiment, the article 103 is a coronary stent (asmall metal mesh tube that acts as a scaffold to provide support insidethe coronary artery). The coronary stent is created by any suitabletechnique, such as, within a coil, tubular mesh, or slotted tubeframework. In a further embodiment, the coronary stent includes a strutpattern, strut width, a diameter (for example, between 2 and 6 mm),length (for example, between 8 mm and 50 mm), or a combination thereof.In one embodiment, the article 103 is a medical-grade probe, such as, a316 stainless steel probe. The medical-grade probe has an internaldiameter (for example, at or greater than 0.1 mm, between 1 mm and 3 mm,or any suitable combination, sub-combination, range, or sub-rangethereof). The medical-grade probe is capable of use in a medicaldiagnostic system.

The article 103 includes a surface 105, which is or includes theinterior surface, an exterior surface, or a combination thereof. Thesurface 105 has surface properties achieved through the coating process200 controllably depositing a layer 102. The layer 102 imparts a surfaceeffect to the substrate 100, the coating 101, the article 103, orcombinations thereof. The substrate 100 is any suitable substrate, suchas, a metallic substrate (ferrous or non-ferrous), stainless steel,titanium, a glass substrate, a ceramic substrate, ceramic matrixcomposite substrate, a composite metal substrate, a coated substrate, afiber substrate, a foil substrate, a film, or a combination thereof.

Referring to FIG. 2, the coating process 200 includes pretreatment (step202), thermal decomposition (step 204), oxidation (step 208),post-oxidation functionalization (step 210), or a combination thereof.In one embodiment, the coating process 200 includes, consist of, orconsists essentially of the pretreatment (step 202) and the thermaldecomposition (step 204). In one embodiment, the coating process 200includes, consist of, or consists essentially of the thermaldecomposition (step 204), the oxidation (step 208), and thepost-oxidation functionalization (step 210). In one embodiment, thecoating process 200 includes, consist of, or consists essentially of thepretreatment (step 202), the thermal decomposition (step 204), theoxidation (step 208), and the post-oxidation functionalization (step210).

The pretreatment (step 202) is or includes any suitable techniques takento prepare a chamber, the surface 105, the substrate 100, or acombination thereof. In one embodiment, the chamber is a chemical vapordeposition chamber, for example, with tubing connections to allow gasflow in and out of the chemical vapor deposition chamber. In a furtherembodiment, the chamber includes multiple controlled inlets and outletsconfigured for providing and removing multiple gas streams and/or avacuum connected to one or more outlet tubes.

Suitable techniques for the pretreatment (step 202) include, but are notlimited to, cleaning, pre-heating, isolating the substrate 100 and/orthe surface 105, surface treatment techniques, evacuating the chamber(for example, with the flow of gas and/or maintenance of a vacuum in thechamber providing a controlled atmosphere), flushing/purging the chamber(for example, with an inert gas such as nitrogen, helium, and/or argon),or a combination thereof. In one embodiment, a heat source controls thetemperature in the chamber, for example, to desorb water and removecontaminants from the surface 105. In one embodiment, the heating is ata temperature above about 100° C. (for example, about 450° C.) and/or ata pressure (for example, between about 1 atmosphere and about 3atmospheres, between about 1 atmosphere and about 2 atmospheres, betweenabout 2 atmospheres and about 3 atmospheres, about 1 atmosphere, about 2atmospheres, about 3 atmospheres, or any suitable combination,sub-combination, range, or sub-range therein). In one embodiment, theheating is for a period of time (for example, between about 3 minutesand about 15 hours, between about 0.5 hours and about 15 hours, forabout 3 minutes, for about 0.5 hours, for about 2 hours, for about 15hours, or any suitable combination, sub-combination, range, or sub-rangetherein).

In one embodiment, the pretreatment (step 202) includes pre-exposure ofthe substrate 100 to a thermal oxidative environment. Pre-exposure ofthe substrate 100 to the thermal oxidative environment pre-oxidizes thesurface 105 of the substrate 100, increasing stability of both thesurface 105 and the substrate 100. The increased stability of thesubstrate 100 increases the stability of the coating 101 formed over thesubstrate 100.

The thermal oxidative environment is at any suitable temperature(s)allowing oxidation. Suitable temperatures include, but are not limitedto between about 100° C. and about 700° C., between about 100° C. andabout 450° C., between about 100° C. and about 300° C., between about200° C. and about 500° C., between about 300° C. and about 600° C.,between about 450° C. and about 700° C., about 700° C., about 450° C.,about 100° C., or any suitable combination, sub-combination, range, orsub-range thereof.

The substrate 100 is pre-exposed to the thermal oxidative environmentfor any suitable duration allowing oxidation. Suitable durationincluding, but are not limited to, between about 30 minutes and 6 hours,between about 30 minutes and about 4 hours, between about 1 hour andabout 4 hours, up to about 10 hours, up to about 4 hours, up to about 2hours, up to about 30 minutes, or any combination, sub-combination,range or sub-range thereof.

The increased stability of the coating 101 is detectable by contactangle measurements for both water and hexadecane, for example, afterexposure of the substrate 100 to room air at 450° C. for 30 minutes. Inone embodiment, the substrate 100 is X40CrMoV5-1 having a compositionincluding by weight percent between about 0.37% and about 0.42% carbon,between about 0.90% and about 1.20% silicon, between about 0.30% andabout 0.50% manganese, up to about 0.030% phosphorous, up to about0.030% sulfur, between about 4.80% and about 5.50% chromium, betweenabout 1.20% and about 1.50% molybdenum, between about 0.90% and about1.10% vanadium, the rest being substantially iron.

In another embodiment, without pre-oxidation of the substrate 100, thecontact angle of water on X40CrMoV5-1 after 30 minutes of exposure to450° C. in room air drops to 28.8° from an initial value of 146.9°, a118.1° change. However, with pre-oxidation of the substrate 100, thecontact angle of water on X40CrMoV5-1 after 30 minutes of exposure to450° C. in room air increases to 127.4° from an initial value of 126.2°,a 1.2° change. In another example, without pre-oxidation the contactangle of hexadecane on X40CrMoV5-1 after 30 minutes of exposure to 450°C. in room air drops to approximately 0° from an initial value of 92.3°,a 92.3° change. However, with pre-oxidation, the contact angle ofhexadecane on X40CrMoV5-1 after 30 minutes of exposure to 450° C. inroom air increases to 72.1° from an initial value of 66.5°, a 5.6°change.

The thermal decomposition (step 204) is or includes thermaldecomposition of one or more precursor materials. In one embodiment, theprecursor material is or includes dimethylsilane, for example, ingaseous form. In general, dimethylsilane is not readily obtainable dueto the low demand for it. Dimethylsilane has been regarded asundesirable in some chemical vapor deposition applications because itincludes carbon and is much more expensive than silane. Silane and themonomethyl analogue to dimethylsilane, methylsilane, are both pyrophoricand may explode in air. Dimethylsilane, although flammable, is notpyrophoric. Thus, use of dimethylsilane decreases safety risks. Inaddition, use of dimethylsilane results in inertness of a coating and/orchemical resistance, thereby protecting the surface 105 of the substrate100. Other suitable precursor materials include, but are not limited to,trimethylsilane, dialkylsilyl dihydride, alkylsilyl trihydride, andcombinations thereof. In one embodiment, the materials arenon-pyrophoric, for example, dialkylsilyl dihydride and/or alkylsilyltrihydride.

The thermal decomposition (step 204) includes any suitable thermaldecomposition parameters corresponding to the precursor material, forexample, as is described in U.S. Pat. No. 6,444,326, which isincorporated herein by reference in its entirety, to apply materialthrough deposition. If a thicker deposition of the layer 102 is desired,the deposition temperature, the deposition pressure, the depositiontime, or a combination thereof are increased or decreased. Suitablethicknesses of the coating 101 include, but are not limited to, betweenabout 100 nm and about 10,000 nm, between about 200 nm and about 5,000nm, between about 300 nm and about 1,500 nm, or any suitablecombination, sub-combination, range, or sub-range therein.

Additionally or alternatively, in one embodiment, a plurality of thelayers 102 are applied by repeating the deposition. In one embodiment,the thermal decomposition (step 204) pressure is between about 0.01 psiaand about 200 psia, 1.0 psia and about 100 psia, 5 psia and about 40psia, about 1.0 psia, about 5 psia, about 40 psia, about 100 psia, 200psia, or any suitable combination, sub-combination, range, or sub-rangetherein. In one embodiment, the thermal decomposition (step 204)temperature is between about 200° C. and 600° C., between about 300° C.and 600° C., between about 400° C. and about 500° C., about 300° C.,about 400° C., about 500° C., about 600° C., or any suitablecombination, sub-combination, range, or sub-range therein. In oneembodiment, the thermal decomposition (step 204) period is for aduration of about 10 minutes to about 24 hours, about 30 minutes toabout 24 hours, about 10 minutes, about 30 minutes, about 15 hours,about 24 hours, or any suitable combination, sub-combination, range, orsub-range therein.

The thermal decomposition (step 204) forms the layer 102, for example,having improved chemical resistance, improved inertness, and/or improvedadhesion over non-diffusion coatings and/or coatings not having thethermally decomposed material. The layer 102 includes any suitablethermally decomposed material corresponding to the precursor material.The thermally decomposed material is formed by the thermal decomposition(step 204) at a pressure and a temperature sufficient to decompose theprecursor material, thereby depositing constituents from the thermallydecomposed material onto the substrate 100, for example, with an inertgas such as nitrogen, helium, and/or argon, as a partial pressuredilutant.

In one embodiment, the thermally decomposed material is or includescarbosilane (for example, amorphous carbosilane), corresponding to theprecursor including the dimethylsilane, which, although not intending tobe bound by theory, is believed to be a recombination of carbosilyl(disilyl or trisilyl fragments) formed from the carbosilane. In oneembodiment, the thermally decomposed material includes molecules, suchas, silicon, carbon, and hydrogen atoms, that serve as active sites. Themolecules are positioned within the layer 102 and include a firstportion 104 and a second portion 106. Generally, the first portion 104and the second portion 106 of the layer 102 are not spatially resolvable(for example, the first portion 104 and the second portion 106 aredefined by the molecules deposited on the layer 102 and the moleculesare capable of being interspersed throughout the layer 102).Furthermore, use of the terms “first” and “second” is not intended toimply any sequentiality, difference in quantity, difference in size, orother distinction between the two portions. To the contrary, the terms“first” and “second” are used for distinguishing molecular compositionof the two portions. For example, in one embodiment, as is shown in FIG.1, the first portion 104 includes silicon and the second portion 106includes carbon. In one embodiment, the first portion 104 and the secondportion 106 are bound together randomly throughout the layer 102.

FIG. 6 shows the composition of an embodiment throughout the article 103by Auger Electron Spectroscopy measurements according to an embodimentof the disclosure. FIG. 6 shows a diffusion region 108 within thearticle 103. It will be appreciated that precise measurement of thediffusion layer 108 via Auger Electron Spectroscopy can be offset bysurface roughness of the substrate and coating and that the resultsshown are merely representative of one embodiment falling within thedisclosure. Therefore, the diffusion region 108, as measured by AugerElectron Spectroscopy, is not an absolute measurement but arepresentation of the diffusion mechanism, according to the coatingprocess 200.

In one embodiment, the composition of the layer 102 is about 1:0.95:0.12ratio of C:Si:O. In contrast, the composition of the dimethylsilaneintroduced into the chemical vapor deposition chamber according to anembodiment has about a 2:1 ratio of C:Si. Although not intending to bebound by theory, it is believed that CH_(x) (x=0−3) moieties areretained and Si—C bonds are broken thus indicating that layer 102includes an amorphous array of Si—C bonding. The amorphous arrayprovides additional benefits such as decreased cracking or flaking, forexample, upon tensile or compressive forces acting on the substrate 100,increased adhesion, or a combination thereof. In one embodiment,multiple layers of the coating 101, or similar coatings, are depositedfor thicker layers or for desired properties.

In one embodiment, upon the thermally decomposed materials forming thelayer 102 through the thermal decomposition (step 204), the chamber ispurged. The purging removes remaining decomposition materials, unboundthermally decomposed materials, and/or other materials or constituentspresent within the chamber.

The oxidation (step 208) is or includes exposure to any suitablechemical species or oxidation reagent capable of donating a reactiveoxygen species under oxidation conditions to form the oxidized layer107. The oxidation (step 208) is of the layer 102 and forms the oxidizedlayer 107. In an embodiment with the layer 102 being amorphouscarbosilane, the oxidized layer 107 formed by the oxidation (step 208)is or includes amorphous carboxysilane. In general, the oxidation (step208) are bulk reactions that affect the bulk of the coating 101. In oneembodiment, the degree of oxidization is controlled by increasing ordecreasing the temperature within the chamber, the exposure time withinthe chamber, the type and/or amount of diluent gases, pressure, and/orother suitable process conditions. Control of the degree of theoxidization increases or decreases the amount and/or depth of theoxidized layer 107 and, thus, the wear resistance and/or hardness of thecoating 101.

Suitable oxidation reagents for the oxidation (step 208) include, butare not limited to, water (alone, with zero air, or with an inert gas),oxygen, air (alone, not alone, and/or as zero air), nitrous oxide,ozone, peroxide, or a combination thereof. As used herein, the term“zero air” refers to atmospheric air having less than about 0.1 ppmtotal hydrocarbons. In one embodiment, the oxidation reagent consists ofgaseous reagents. Due to the gaseous processing agents (for example,dimethylsilane and/or nitrogen) being in the gas phase, use of thegaseous oxidation reagent results in simpler scale-up for manufacturing,a more transferable process, and a more economical process.

The oxidation reagent used for the oxidation (step 208) is introduced atany suitable operational conditions permitting the formation of theoxidized layer 107. Suitable operational conditions include, but are notlimited to, being in the presence of an inert gas, being at a pressure(for example, between about 1 to 200 psia), being subjected to atemperature (for example, about 450° C.), being for a period of time(for example, for about two hours), other parameters as are describedabove with reference to the thermal decomposition (step 204), or acombination thereof.

In one embodiment, depending upon the selected species of the oxidationreagent, additional features are present, for example, for safetypurposes. Such features include the chamber having a size, weight,and/or corrosion-resistance permitting reactions to occur safely. In oneembodiment, to safely inject water into the chamber as the oxidationreagent, substantial cooling is used. For example, in embodiments withthe chamber operating at temperature of greater than about 300° C., thechamber is first cooled below about 100° C., which is capable ofresulting in a drain on energy and/or time of manufacturing resources.

The oxidized layer 107 formed by the oxidation (step 208) includesproperties corresponding to the oxidation reagent used and theoperational parameters. In one embodiment, in comparison to the layer102, the oxidized layer 107 is over-oxidized and/or has a contact angleon a Si wafer of about 60° has an increased amount of N—H, Si—OH, and/orC—OH groups, has fragile scratch resistance, has increased acidresistance, has increased corrosion resistance, or a combinationthereof.

The oxidized layer 107 includes various comparative properties relativeto the layer 102, and/or embodiments with the oxidized layer 107 beingformed by different oxidation reagents. For example, the oxidized layer107 has decreased chemical resistance, has decreased scratch resistance,has decreased hardness, or a combination thereof. In one embodiment, theoxidized layer 107 is oxidized and/or has a contact angle on a Si waferof about 86.6° has decreased friction (for example, in comparison toembodiments with the oxidizing reagent being zero air and water), hasdecreased wear resistance (for example, in comparison to embodimentswith the oxidizing reagent being zero air and water), includes Si—O—Sigroups (for example, capable of being shown by FT-IR data having agrowth of the Si—O—Si peak at 1026.9 cm⁻¹ compared to the non-waterfunctionalized peak at 995.2 cm⁻¹), or a combination thereof. In oneembodiment, the oxidized layer 107 is over-oxidized, has a decreasedamount of C—H groups (for example, in comparison to embodiments with theoxidizing reagent being water alone), has a decreased amount of Si—Cgroups (for example, in comparison to embodiments with the oxidizingreagent being water alone), has an increased amount of Si—OH/C—OH groups(for example, in comparison to embodiments with the oxidizing reagentbeing water alone), or a combination thereof. In one embodiment, theoxidized layer 107 has lower coefficient of friction (for example, incomparison to embodiments with the oxidization agent being zero air andwater), has increased wear resistance (for example, in comparison toembodiments with the oxidization agent being zero air and water),includes Si—O—Si groups, or a combination thereof.

In one embodiment, the coefficient of friction is decreased by theoxidation (step 208). For example, in an embodiment with the oxidation(step 208) of the layer 102, the layer 102 includes a first coefficientof friction (for example, about 0.97) prior to the oxidation (step 208)and a second coefficient of friction (for example, about 0.84) after theoxidation (step 208).

In one embodiment, the wear rate is decreased by the oxidation (step208). For example, in an embodiment with the oxidation (step 208) of thelayer 102, the layer 102 includes a first wear rate (for example,4.73×10⁻⁴ mm³/N/m) prior to the oxidation (step 208) and a second wearrate (for example, about 6.75×10⁻⁵ mm³/N/m) after the oxidation (step208).

In one embodiment including the oxidation (step 208) using water as theoxidant, the article 103 includes a composition as is shown in the AugerElectron Spectroscopy plot of FIG. 7 or a similar variation thereof.

The post-oxidation functionalization (step 210) is or includes thermalcoupling of one or more materials.

In one embodiment, the post-oxidation functionalization (step 210)modifies the oxidized layer 107, for example, by heating and/ormodifying the surface, to form the oxidized-then-functionalized layer109 shown in FIGS. 4-5. Heat, exposure times, diluent gases, andpressures are adjusted to affect the degree of post-oxidationfunctionalization (step 210). Control of this degree of thepost-oxidation functionalization (step 210) imparts predeterminedproperties. In one embodiment, the oxidized layer is exposed to anorganosilane reagent at a temperature of about 300° to 600° C., forabout 1 to 24 hours and at a pressure of about 5 to 100 psia, in somecases about 25 psia, about 27 psia, about 54 psia, or any suitableranges there between. In one embodiment, inert diluent gases are used,such as argon or nitrogen, for example, at partial pressures of about 1to 100 psia to assist the reaction.

In one embodiment, the oxidized-then-functionalized layer 109 has acontact angle for deionized water on a mirror surface of greater thanabout 105°, greater than about 110°, greater than about 112°, betweenabout 100° and about 114°, about 110.3°, about 112.1°, about 113.7°, orany suitable range, sub-range, combination, or sub-combination thereof.Additionally or alternatively, in one embodiment, theoxidized-then-functionalized layer 109 has a contact angle for deionizedwater on a mirror surface that is less than polytetrafluoroethylene, forexample, by about 1°, about 2°, between about 1° and about 2°, or anysuitable range, sub-range, combination, or sub-combination thereof.

In one embodiment, the oxidized-then-functionalized layer 109 has acontact angle for deionized water on a rough surface of greater thanabout 140°, greater than about 145°, between about 140° and about 150°,about 142.7°, about 145.7°, about 148.1°, or any suitable range,sub-range, combination, or sub-combination thereof. Additionally oralternatively, in one embodiment, the oxidized-then-functionalized layer109 has a contact angle for deionized water on a rough surface that isgreater than polytetrafluoroethylene, for example, by about 25°, about30°, between about 20° and about 35°, or any suitable range, sub-range,combination, or sub-combination thereof.

In one embodiment, the oxidized-then-functionalized layer 109 hasgreater anti-stiction properties than the oxidized layer 107, forexample, formed with zero air as the binding reagent. As such, in oneembodiment of the coating process 200, the oxidized-then-functionalizedlayer 109 has increased anti-stiction.

By modifying and varying the R-groups, or by using other moleculescapable of hydroxyl reactivity, surface properties of theoxidized-then-functionalized layer 109 are adjusted. For example, in oneembodiment, the adjustments increase or decrease hardness andanti-stiction, wear resistance, inertness, electrochemical impedance,contact angle, or a combination thereof, thereby providing physicalperformance characteristics expanding the applicability and durabilityfor use in biomedical and marine fields.

The following Examples show various elements relating to the disclosure.Properties and parameters disclosed within the Examples should beconsidered as being disclosed within the Detailed Description of theInvention, whether comparative in nature or illustrative in nature.

EXAMPLE 1

A first example includes performing the process 200 on a sensor of aQuartz Crystal Microbalance with Dissipation monitoring (QCM-D) systemto form the coating 101. QCM-D is employed as a highly sensitive masssensor to detect mass uptake or release on the ng/cm² scale at thesensor surface by interpreting changes in the quartz resonancefrequency. The coating 101 includes protein-repellant properties formedon the surface of a QCM-D sensor. The QCM-D sensor is a circular quartzcrystal of 14 mm in diameter and 0.3 mm in thickness. The quartz crystalis coated with a layer of gold electrode (40-1,000 nm in thickness) onboth sides for electrical contact. On one side of the crystal, the goldis further coated with medical-grade 316L stainless steel. The process200 includes the thermal decomposition (step 204) of the dimethylsilaneapplying the coating 101 to the QCM-D sensor substrate for 6 to 15 hoursat 10 to 30 psia gas at 450° C. to form the layer 102.

The layer 102 is then oxidized (step 208) with zero air for 2 hours atabout 1 to 200 psia gas at a temperature between 250-500° C. to form theoxidized layer 107. The process 200 then includes post-oxidationfunctionalization (step 210) of the oxidized layer 107 by introducingtrimethylsilane to an evacuated chamber including the oxidized layer 107at 400-500° C. and 25 psia and reacted for 5-10 hours to form thecoating 101.

Contact angle is measured to be 92.3° on the coated stainless steelsurface showing hydrophobic property. The coating thickness is measuredto be 250 nm.

EXAMPLE 2

The second example includes performing the process 200 as described inExample 1 on the exterior and interior surfaces of a medical-grade 316Lstainless steel probe, capable of use in an in vitro medical diagnosticsystem. The probe has an internal diameter in the range of 1 mm to 3 mm.The process 200 forms the coating 101 on the exterior and the interiorsurfaces of the probe.

Contact angle is measured to be 92.3° on the coated stainless steelsurface showing hydrophobic property. The coating thickness is measuredto be about 27 nm in the interior surface.

EXAMPLE 3

The third example includes performing the process 200 as described inExample 1 on a rectangular panel of 316L stainless steel having a sizeof 4 inches by 8 inches (10.2×20.3 cm) and 0.6 cm in thickness. Holeshaving a 1.3 cm diameter are drilled 2 cm from the sides of each cornerof the panel. The coating 101 is formed by the process 200 on allsurfaces of the panel. The coating 101 is then exposed to biofouling ina seawater environment to ascertain the relative antifouling performancecompared to reference surfaces. Results show that the coating 101includes resistance to biofouling that is greater than coatings failingto include one or more of the features described herein.

Contact angle is measured to be 92.3° on the coated stainless steelsurface showing hydrophobic property. The coating thickness is measuredto be about 1,000 nm.

While only certain features and embodiments of the invention have beenshown and described, many modifications and changes may occur to thoseskilled in the art (for example, variations in sizes, dimensions,structures, shapes and proportions of the various elements, values ofparameters (for example, temperatures, pressures, etc.), mountingarrangements, use of materials, colors, orientations, etc.) withoutmaterially departing from the novel teachings and advantages of thesubject matter recited in the claims. The order or sequence of anyprocess or method steps may be varied or re-sequenced according toalternative embodiments. It is, therefore, to be understood that theappended claims are intended to cover all such modifications and changesas fall within the true spirit of the invention. Furthermore, in aneffort to provide a concise description of the embodiments, all featuresof an actual implementation may not have been described (i.e., thoseunrelated to the presently contemplated best mode of carrying out theinvention, or those unrelated to enabling the claimed invention). Itshould be appreciated that in the development of any such actualimplementation, as in any engineering or design project, numerousimplementation specific decisions may be made. Such a development effortmight be complex and time consuming, but would nevertheless be a routineundertaking of design, fabrication, and manufacture for those ofordinary skill having the benefit of this disclosure, without undueexperimentation.

What is claimed is:
 1. An industrial equipment article, comprising: acoating on a substrate of the industrial equipment article, the coatingincluding silicon, carbon, and hydrogen; wherein the industrialequipment article requires resistance to protein adsorption; wherein thesubstrate of the industrial equipment article was heated duringapplication of the coating to a temperature of between 300 degrees C.and 600 degrees C.
 2. The industrial equipment article of claim 1,wherein the application of the coating is by thermal decomposition,oxidation, then functionalization.
 3. The industrial equipment articleof claim 2, wherein the oxidation is by introduction of zero air.
 4. Theindustrial equipment article of claim 2, wherein the functionalizationis by introduction of trimethylsilane.
 5. The industrial equipmentarticle of claim 1, wherein the substrate is stainless steel.
 6. Theindustrial equipment article of claim 5, wherein the stainless steelincludes 316 stainless steel.
 7. The industrial equipment article ofclaim 1, wherein the substrate is titanium.
 8. The industrial equipmentarticle of claim 1, wherein the substrate is a composite metal.
 9. Theindustrial equipment article of claim 1, wherein the substrate is glass.10. The industrial equipment article of claim 1, wherein the substrateis a fiber substrate or a foil substrate.
 11. The industrial equipmentarticle of claim 1, wherein the coating is positioned in a tube, thetube having an internal diameter of between 1 millimeter and 3millimeters.
 12. The industrial equipment article of claim 1, whereinthe coating is positioned in a tube, the tube having an internaldiameter of less than 3 millimeters.
 13. The industrial equipmentarticle of claim 1, wherein the coating is positioned in a tube, thetube having an internal diameter of between 0.1 millimeter and 1millimeters.
 14. The industrial equipment article of claim 1, whereinthe coating is positioned in a tube, the tube having an internaldiameter of between 0.1 millimeter and 3 millimeters.
 15. The industrialequipment article of claim 1, wherein the coating has a thickness ofbetween about 100 nm and about 1,000 nm.
 16. The industrial equipmentarticle of claim 1, wherein the coating is amorphous.
 17. The industrialequipment article of claim 1, wherein the coating includes an amorphousarray of Si—C bonds.
 18. The industrial equipment article of claim 1,wherein the thermal decomposition is by introduction of dimethylsilane.19. A thermal chemical vapor coated article, comprising: a coating onthe thermal chemical vapor coated article, the coating formed by thermaldecomposition, oxidation then functionalization; wherein the thermalchemical vapor coated article is industrial equipment requiringresistance to protein adsorption; wherein the coating is resistant tothe protein adsorption and is on a substrate heated during the thermaldecomposition.
 20. A thermal chemical vapor coated article, comprising:a coating on the thermal chemical vapor coated article, the coatingformed by thermal decomposition on a stainless steel surface, oxidationthen functionalization; wherein the thermal chemical vapor coatedarticle is industrial equipment requiring resistance to proteinadsorption; wherein the coating is resistant to the protein adsorptionand is on a substrate heated during the thermal decomposition; whereinthe thermal decomposition is by introduction of dimethylsilane; whereinthe oxidation is by introduction of zero air; and wherein thefunctionalization is by introduction of trimethylsilane.